Vacuum Wafer Chuck

1.Smooth surface,high quality with competitive price 2.Sample is ok 3.on time delivery

Features: 

1.Superior comprehensive properties 2.High strength,hardness and wear resistance 3.Excellent insulation properties

4.Good corrosion resistance

5.Low and stable dielectric loss

6.Excellent thermal conductivity and heat shocking resistance

Mechanical Characteristics

		Bulk Density(g/cc)	Water Absorption(%)	Vickers Hardness(GPa)	Flexural Strength(MPa)	Compressive Strength(MPa)	Young's Modulus of Elasticity(GPa)	Poisson's Ratio	Fracture Toughness(MPa√m)
Al2O3	92.0	3.60	0	12.5	360	2200	280	0.23	–
	97.0	3.70	0	13.8	350	2250	330	0.23	3
	99.8	3.92	0	18.0	380	2450	388	0.22	4-5
ZRO2		6.00	0	13.0	1250	5690	210	0.31	6-7

Thermal Characteristics

	Al2O3			ZRO2
	92.0	97.0	99.8	–
Coefficient of Linear Thermal Expansion/40-400°c (χ10-6/°c)	7.0	7.1	6.8	10.0
Thermal Conductivity(20°c)	17.5	25	32	3
Specific Heat (J/(kg.k)χ103)	0.78	0.78	0.80	0.46
Thermal Shock Resistance (°c)	200	200	220	350

Electrical Characteristics

	Al2O3			ZRO2
	92.0	97.0	99.8	-
Volume Resistivity/20°c (Ω.cm)	>1014	>1014	>1015	–
Dielectric Strength(KV/mm)	16	16	20	–
Dielectric Constant(1MHz)	9.0	9.5	9.8	–
Loss Tangent(Χ10-4)	7.0	3.0	1.0	–

 Chemical Characteristics

	Al2O3			ZRO2
	92.0	97.0	99.8	–
Nitric Acid/60%/ 90°c (WT Loss:mg/cm2/day)	<0.15	< 0.12	< 0.05	0
Sulphuric Acid/95%/95°c	< 0.34	< 0.30	< 0.23	< 0.04
Caustic Soda/30%/80°c	< 0.95	< 0.90	< 0.04	< 0.08

Vacuum Wafer Chuck